Measurement of mechanical properties for dense and porous...

Journal of Applied Physics 2000 Vol. 88; Iss. 10

Measurement of mechanical properties for dense and porous polymer films having a low dielectric constant

Xu, Yuhuan, Tsai, Yipin, Zheng, D. W., Tu, K. N., Wo Ong, Chung, Choy, Chung Loong, Zhao, Bin, Liu, Q.-Z., Brongo, Maureen
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Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1287756
File:
PDF, 505 KB
english, 2000
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