Anisotropic surface etching of 6H–SiC(0001) induced by reaction with oxygen molecules
Kubo, O., Kobayashi, T., Yamaoka, N., Itou, S., Katayama, M., Oura, K., Ohkado, H.Volume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1485136
File:
PDF, 568 KB
english, 2002