[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A novel comb-drive electrostatic stepper motor,
Paratte, L., Racine, G.-A., de Rooij, N.F., Bornand, E.Year:
1991
DOI:
10.1109/sensor.1991.149028
File:
PDF, 293 KB
1991