Corrosion behavior of sputter-deposited TiN thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 5

Corrosion behavior of sputter-deposited TiN thin films

Martı́n-Palma, R. J., Manso, M., Martı́nez-Duart, J. M., Conde, A., Damborenea, J. J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1593053
File:
PDF, 337 KB
english, 2003
Conversion to is in progress
Conversion to is failed