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Some calculations for the thickness distribution of large-area high-temperature superconducting film deposited by inverted cylindrical sputtering
Tao, B. W., Liu, X. Z., Chen, J. J., Li, Y. R., Fromknecht, R., Geerk, J.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1545475
File:
PDF, 403 KB
english, 2003