[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Effective testing for wafer reject minimization by terahertz analysis and sub-surface imaging
Rahman, Anis, Rahman, Aunik K.Year:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847013
File:
PDF, 919 KB
english, 2014