Characterization of a high-density, direct-current reflex...

Review of Scientific Instruments 2002 Vol. 73; Iss. 8

Characterization of a high-density, direct-current reflex discharge plasma source operating in Ar and N[sub 2]

Toader, E. I., Graham, W. G., Mahony, C. M. O., Steen, P. G.
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Volume:
73
Year:
2002
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1493234
File:
PDF, 387 KB
english, 2002
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