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Fracture strength of silicon carbide microspecimens
Sharpe, W.N., Jadaan, O., Beheim, G.M., Quinn, G.D., Nemeth, N.N.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851862
Date:
October, 2005
File:
PDF, 1.60 MB
english, 2005