Effect of phosphorus doping on stress in silicon and...

Effect of phosphorus doping on stress in silicon and polycrystalline silicon

Murarka, S. P., Retajczyk, T. F.
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Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332255
File:
PDF, 553 KB
english, 1983
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