Fully Depleted Strained-SOI n- and p-MOSFETs on Bonded SGOI Substrates and Study of the SiGe/BOX Interface
Cheng, Z., Pitera, A.J., Lee, M.L., Jung, J., Hoyt, J.L., Antoniadis, D.A., Fitzgerald, E.A.Volume:
25
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2003.823057
Date:
March, 2004
File:
PDF, 114 KB
english, 2004