MEMS for Thermogravimetry: Fully Integrated Device for...

Journal of Microelectromechanical Systems 2011 / 12 Vol. 20; Iss. 6

MEMS for Thermogravimetry: Fully Integrated Device for Inspection of Nanomasses

Iervolino, Elina, van Herwaarden, Alexander W., van der Vlist, Wim, Sarro, Pasqualina M.
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2167672
Date:
December, 2011
File:
PDF, 834 KB
english, 2011
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