Strain in silicon nanowire beams
Ureña, Ferran, Olsen, Sarah H., Šiller, Lidija, Bhaskar, Umesh, Pardoen, Thomas, Raskin, Jean-PierreVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4765025
File:
PDF, 2.02 MB
english, 2012