Sustained self-sputtering using a direct current magnetron...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1993 / 11 Vol. 11; Iss. 6

Sustained self-sputtering using a direct current magnetron source

Posadowski, Witold M.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578679
Date:
November, 1993
File:
PDF, 665 KB
english, 1993
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