Thickness-dependent stress in sputtered carbon films

Thickness-dependent stress in sputtered carbon films

Puchert, M. K.
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578814
Date:
May, 1994
File:
PDF, 914 KB
english, 1994
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