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H− beam based projection microlithography: A conceptual study of the beam parametersa)
Guharay, S. K., Reiser, M., Dudnikov, V. G.Volume:
65
Year:
1994
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1144870
File:
PDF, 854 KB
english, 1994