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Experimental and theoretical study of heterogeneous iron precipitation in silicon
Haarahiltunen, A., Väinölä, H., Anttila, O., Yli-Koski, M., Sinkkonen, J.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2472271
File:
PDF, 400 KB
english, 2007