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Role of oxygen atoms in the growth of magnetron sputter-deposited ZnO films
Jie, Jin, Morita, Aya, Shirai, HajimeVolume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3457867
File:
PDF, 1.14 MB
english, 2010