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Stabilization of long travel-single bellows-horizontal manipulators
Smentkowski, V. S., Linsebigler, A. L.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581725
File:
PDF, 500 KB
english, 1999