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Ellipsometric and Rutherford backscattering characterization of low-energy hydrogen-, helium-, neon-, and argon-bombarded silicon
Buckner, J. L., Vitkavage, D. J., Irene, E. A.Volume:
63
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.340392
File:
PDF, 1.04 MB
english, 1988