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Characteristics of a microwave electron cyclotron resonance plasma source
Camps, Enrique, Olea, Oscar, Gutiérrez-Tapia, C., Villagrán, MayoVolume:
66
Year:
1995
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1145554
File:
PDF, 1.05 MB
english, 1995