Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 μm
Stiens, J., Ranson, W., Cottam, R., De Tandt, C., Vounckx, R., Kotov, V., Shkerdin, G., Dhoedt, B., Baets, R.Volume:
69
Year:
1996
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.117249
File:
PDF, 501 KB
english, 1996