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Improvement of the thickness distribution of a quartz crystal wafer by numerically controlled plasma chemical vaporization machining
Shibahara, Masafumi, Yamamura, Kazuya, Sano, Yasuhisa, Sugiyama, Tsuyoshi, Endo, Katsuyoshi, Mori, YuzoVolume:
76
Year:
2005
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2041594
File:
PDF, 569 KB
english, 2005