Ion species measurement of high current metal ion beams...

Ion species measurement of high current metal ion beams extracted from a multicusp ion source

Matsuda, Yasuhiro, Inami, Hiroshi, Yamashita, Takatoshi, Fujiwara, Shuichi, Inouchi, Yutaka, Matsunaga, Kouzi, Matsuda, Koji
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Volume:
63
Year:
1992
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1142918
File:
PDF, 607 KB
english, 1992
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