A two-dimensional flow sensor using integrated silicon...

Review of Scientific Instruments 1997 Vol. 68; Iss. 10

A two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectors

Baiyong, Liu, Lai, P. T., Xueren, Zheng, Zhaohui, Wu, Bin, Li
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Volume:
68
Year:
1997
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148027
File:
PDF, 393 KB
english, 1997
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