Enhancement of thermal stability of NiSi films on (100)Si...

Enhancement of thermal stability of NiSi films on (100)Si and (111)Si by Pt addition

Mangelinck, D., Dai, J. Y., Pan, J. S., Lahiri, S. K.

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Volume:

Year:

1999

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.124803

File:

PDF, 406 KB

english, 1999

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