[IEEE 2010 International Conference on Information and Automation (ICIA) - Harbin, China (2010.06.20-2010.06.23)] The 2010 IEEE International Conference on Information and Automation - Stable and accurate trajectory control technology for the wafer transfer robot
Liu, Yanjie, Hu, Yong, Zheng, XiaofeiYear:
2010
Language:
english
DOI:
10.1109/icinfa.2010.5512105
File:
PDF, 197 KB
english, 2010