29.3: Invited Paper : The...

SID Symposium Digest of Technical Papers 2013 / 06 Vol. 44; Iss. 1

29.3: Invited Paper : The Mechanical Reliability of Flexible ALD Barrier Films

Bulusu, Anuradha, Behm, Henrik, Sadeghi-Tohidi, Farzad, Bahre, Hendrick, Baumert, Eva, Samet, David, Hopmann, Christian, Winter, Jörg, Pierron, Olivier, Graham, Samuel
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Volume:
44
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/j.2168-0159.2013.tb06221.x
Date:
June, 2013
File:
PDF, 1.98 MB
english, 2013
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