Application of the shaped electrode technique to a large...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2006 Vol. 24; Iss. 4

Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity

Sansonnens, L., Schmidt, H., Howling, A. A., Hollenstein, Ch., Ellert, Ch., Buechel, A.
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2189266
File:
PDF, 662 KB
english, 2006
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