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[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Drift-Free Single Crystalline Silicon Micromirror with Floating Field Limiting Shields
Yoo, Byung-Wook, Jang, Yun-Ho, Yu, Kyoungsik, Park, Jae-Hyoung, Kim, Yong-KweonYear:
2007
Language:
english
DOI:
10.1109/omems.2007.4373850
File:
PDF, 703 KB
english, 2007