Nonlinear and linearized algorithms for the Young’s modulus extraction of thin films through the capacitance-voltage measurement of microstructures
Hu, Yuh-Chung, Tu, Wei-HsiangVolume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2133898
File:
PDF, 458 KB
english, 2005