Space–time resolved kinetics of mixed rare-gas-attaching...

Space–time resolved kinetics of mixed rare-gas-attaching gas plasmas

Gottscho, Richard A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575711
Date:
May, 1988
File:
PDF, 572 KB
english, 1988
Conversion to is in progress
Conversion to is failed