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Mechanical stress of the electrical performance of polycrystalline-silicon resistors
Nakabayashi, N., Ohyama, H., Simoen, E., Ikegami, M., Claeys, C., Kobayashi, K., Yoneoka, M., Miyahara, K.Volume:
16
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2001.0354
Date:
September, 2001
File:
PDF, 227 KB
english, 2001