Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head
Okabe, Hiroshi, Hayakawa, Masayuki, Matoba, Junichi, Naito, Hitoshi, Oka, KazuhikoVolume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3206346
File:
PDF, 651 KB
english, 2009