Epitaxial planarization of patterned yttria-stabilized...

Applied Physics Letters 1995 Vol. 67; Iss. 8

Epitaxial planarization of patterned yttria-stabilized zirconia substrates for multilayer structures

Chang, Bertha P., Sonnenberg, Neville, Cima, Michael J., Sun, Jonathan Z., Yu-Jahnes, Lock See
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Volume:
67
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.114990
File:
PDF, 413 KB
english, 1995
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