[IEEE 2009 IEEE International Ultrasonics Symposium - Rome, Italy (2009.09.20-2009.09.23)] 2009 IEEE International Ultrasonics Symposium - Discussion of millimeter wave FBAR with very thin AlN film fabricated using MOCVD method
Tanifuji, Shoichi, Aota, Yuji, Kameda, Suguru, Takagi, Tadashi, Tsubouchi, KazuoYear:
2009
Language:
english
DOI:
10.1109/ultsym.2009.5441657
File:
PDF, 308 KB
english, 2009