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The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas
Schüngel, E., Eremin, D., Schulze, J., Mussenbrock, T., Czarnetzki, U.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4747914
File:
PDF, 2.77 MB
english, 2012