Comparison of wet and dry etching of zinc indium oxide for...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 1

Comparison of wet and dry etching of zinc indium oxide for thin film transistors with an inverted gate structure

Marrs, Michael A., Vogt, Bryan D., Raupp, Gregory B.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3668090
File:
PDF, 2.13 MB
english, 2012
Conversion to is in progress
Conversion to is failed