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Effects of residual gas control in relationship with sputtered aluminum film morphology and electromigration properties in fine-line very large scale integrated structures
Rocke, M. J.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575306
Date:
May, 1988
File:
PDF, 943 KB
english, 1988