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Knudsen compressor as a micro- and macroscale vacuum pump without moving parts or fluids
Vargo, S. E., Muntz, E. P., Shiflett, G. R., Tang, W. C.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581765
File:
PDF, 430 KB
english, 1999