Highly conformal ZrO[sub 2] deposition for dynamic random...

Highly conformal ZrO[sub 2] deposition for dynamic random access memory application

Chang, Jane P., Lin, You-Sheng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
90
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1389756
File:
PDF, 876 KB
english, 2001
Conversion to is in progress
Conversion to is failed