Nanofeatures on GaAs (111)B via photolithography

Nanofeatures on GaAs (111)B via photolithography

Rajkumar, K. C., Kaviani, K., Chen, J., Chen, P., Madhukar, A.
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Volume:
60
Year:
1992
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.106534
File:
PDF, 718 KB
english, 1992
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