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A small unbalanced magnetron sputtering source with multipole magnetic field anode
Zheng, Sixiao, Sun, Guanqing, Wang, Peilu, Liao, XiaodongVolume:
65
Year:
1994
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1145001
File:
PDF, 573 KB
english, 1994