Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 6
Patterning of silicon nanopillars formed with a colloidal gold etch mask
Lewis, P. A., Ahmed, H.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590988
File:
PDF, 993 KB
english, 1999