Patterning of silicon nanopillars formed with a colloidal...

Patterning of silicon nanopillars formed with a colloidal gold etch mask

Lewis, P. A., Ahmed, H.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590988
File:
PDF, 993 KB
english, 1999
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