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Automated gate valve operation for pressure control
Barshilia, Harish C., Kalmar, Balazs, Windsor, Norman R., Kershmann, Gordon, O’Brien, James J.Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148687
File:
PDF, 350 KB
english, 1998