Automated gate valve operation for pressure control

Barshilia, Harish C., Kalmar, Balazs, Windsor, Norman R., Kershmann, Gordon, O’Brien, James J.

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Volume:

Year:

1998

Language:

english

Journal:

Review of Scientific Instruments

DOI:

10.1063/1.1148687

File:

PDF, 350 KB

english, 1998

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