Degradation mechanism of Schottky diodes on inductively coupled plasma-etched n-type 4H-SiC
Choi, Kyoung Jin, Han, Sang Youn, Lee, Jong-LamVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1581347
File:
PDF, 358 KB
english, 2003