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[IEEE 1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual - Reno, NV, USA (1998.03.31-1998.04.2)] 1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98 - A comparative study of leakage mechanism of Co and Ni salicide processes
Goto, K.-I., Watanabe, J., Sukegawa, T., Fushida, A., Sakuma, T., Sugii, T.Year:
1998
Language:
english
DOI:
10.1109/relphy.1998.670670
File:
PDF, 1.26 MB
english, 1998