Development of the ion source for cluster implantationa)

Review of Scientific Instruments 2014 / 02 Vol. 85; Iss. 2

Development of the ion source for cluster implantationa)

Kulevoy, T. V., Seleznev, D. N., Kozlov, A. V., Kuibeda, R. P., Kropachev, G. N., Alexeyenko, O. V., Dugin, S. N., Oks, E. M., Gushenets, V. I., Hershcovitch, A., Jonson, B., Poole, H. J.
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4825075
Date:
February, 2014
File:
PDF, 725 KB
english, 2014
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