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Spatially and time-resolved detection of gallium atoms formed in the laser photochemical vapor deposition process of trimethylgallium by laser-induced fluorescence: Decomposition in the adsorbed state
Suzuki, Hideyuki, Mori, Koji, Kawasaki, Masahiro, Sato, HiroyasuVolume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342489
File:
PDF, 627 KB
english, 1988