Modeling of Wet Stiction in Microelectromechanical Systems (MEMS)
Hariri, A., Zu, J., Mrad, R.B.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.904349
Date:
October, 2007
File:
PDF, 779 KB
english, 2007