Growth of epitaxial TiN films on MgO(100) by high current...

Journal of Applied Physics 1992 Vol. 72; Iss. 12

Growth of epitaxial TiN films on MgO(100) by high current discharge plasma

Miyagawa, S., Saitoh, K., Niwa, H., Ikeyama, M., Massouras, G., Miyagawa, Y.
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Volume:
72
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.351915
File:
PDF, 830 KB
english, 1992
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